TY - JOUR AU - Wong, V. V. AU - Ferrera, J. AU - Damask, J. N. AU - Murphy, Thomas E. AU - Smith, H. I. AU - Haus, H. A. TI - Distributed Bragg grating integrated-optical filters: Synthesis and fabrication JO - J. Vac. Sci. Technol. B VL - 13 IS - 6 SP - 2859 EP - 2864 PY - 1995 DO - 10.1116/1.588305 AB - The design, fabrication, and measurement of planar, passive Bragg grating‐based transmission filters is presented. We combine interferometric lithography, spatial‐phase‐locked electron‐beam lithography, x‐ray nanolithography, and optical lithography with silica‐on‐silicon waveguiding substrates to define rib waveguides and grating patterns that have multiple quarter‐wave shifts along the grating length. Transmission filters such as Gaussian, Butterworth, and Chebyshev can be designed and fabricated with these technologies. ER -