Distributed Bragg grating integrated-optical filters: Synthesis and fabrication

Published/Posted: November 1, 1995

Authors: Wong, V. V.; Ferrera, J.; Damask, J. N.; Murphy, T. E.; Smith, H. I.; Haus, H. A.

DOI: 10.1116/1.588305

Abstract: The design, fabrication, and measurement of planar, passive Bragg grating-based transmission filters is presented. We combine interferometric lithography, spatial-phase-locked electron-beam lithography, x-ray nanolithography, and optical lithography with silica-on-silicon waveguiding substrates to define rib waveguides and grating patterns that have multiple quarter-wave shifts along the grating length. Transmission filters such as Gaussian, Butterworth, and Chebyshev can be designed and fabricated with these technologies.

Citation:
V. V. Wong, J. Ferrera, J. N. Damask T. E. Murphy, H. I. Smith and H. A. Haus, "Distributed Bragg grating integrated-optical filters: Synthesis and fabrication", J. Vac. Sci. Technol. B 13(6) 2859-2864 (1995)
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Manuscript: Wong_JVSTB_13_2859_1995.pdf